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- IBAD (Ion Beam Assisted Deposition)
IBAD (Ion Beam Assisted Deposition)
Ion Beam Assisted Deposition method makes use of an argon ion beam directed at a certain angle to the tape's surface while growing an oxide layer. As a result, only nuclei with a strong biaxial orientation remain on the surface. This tool creates a template surface with an inplane oriented structure, which is a perfect substrate for subsequent deposition of a superconducting layer.
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